Antireflection Coating Optical Coating Machine for Beam Splitter
This equipment is designed for coating precision optical thin
film,each system unit and overall structure well meet the optical
thin film production process requirements,which suitable for
coating anti-reflection film, bandpass film ,IR-Cut filter etc.It
equipped with high-precision film thickness control
system,excellent performance electron gun,high degree automation
coating control system, etc. It's the ideal equipment for coating
high precision optical thin film.
Model:ZZS800 Optical thin film coater
Substrate Dome Size:Φ750mm
Substrate Dome Rotation Speed:3rpm to 30rpm(Variable)
Optical Film Thickness Control System:SQC310+6point rotary
sensor,full automatic coating control system.
Evaporation Source:5kw electron Beam source: 1 units, resistance
Vacuum System:Rotary Pump + Roots Pump +Diffusion Pumps
Recover vacuum:From atmosphere to 4 x 10-3 Pa≦12min.
Substrate Heater:350℃ (max.)
Power Requirements:three-phase ,220V/380V±5%,50HZ
Cooling Water Flow Rate:100 /min or greater
Compressed Air Pressure:0.6～0.8MPa
Optical vacuum coating machine widely used for anti-reflective
coating,reflective coating,filter coating,beam splitting film
coating,cut-off film/bandpass film coating,high-reflective film
coating,EMI coating,AF coating,waterproof coating ,color reflective
film etc film system ,which can realize 0~99layers film,at the same
time can meet car reflective glass,telescope,eyeglasses,optical
lens,cold light cup etc products coating requirements.