AR coating machine brief introduction:
Baking temperature:Max 350 ℃,temperature uniformity:300℃ ±5℃ (40 min)
Vacuum chamber:vacuum chamber size Φ1120×1300MM,304 stainless steel,2 sets
Controller cabinet: high-tension transformer, filament transformer,electric reactor
all adopt resin potting.Equipment can realize automatic NO / OFF
Workpiece frame system:Magnetic liquid sealing device,water jacket all is stainless
steel,revolving speed 3～30rpm, AC variable frequency speed
regulating, up driven way.
Vacuum degree:Ultimate vacuum 3.0×10 -4 Pa,vacuum holding requirements:after
chamber reach ultimate vacuum,close high vacuum valve 12
hours,chamber vacuum degree ≤20Pa,and close high vacuum valve
1hours,chamber vacuum degree ≦6 x 10-1 Pa,restore vacuum time<15
min back to 3X10 -3 Pa.
Pumping system:diffusion pump + mechanical pump+roots pump
Repeatability and uniformity: whole cover film thickness distribution uniformity, each position
spectral curve error ±2nm,each cover with good repeatability,the
same place repeat 5 times film thickness error of ±3 nm (not less
than 7 layers).
E-beam gun: 1pcs,10kw
Resistance evaporation: 1set ,5kw crystal control automatic control can be realized.
Film thickness instruments: American SQC310 ,Crystal point 6 probe,fully automatic coating
Flowmeter: automatically filling different gas flow according to the
different crucible .
Cryogenic:Through program control to prevent cryogenic back temperature cause
Electric control:PLC programmable controller +LCD color touch screen control whole
operation process:vacuum,heater,melt,coating,cryogenic,take ,one
AR film:420nm-680nm R<0.25%,
Optical coating machine application:
1.For clean energy:
Transparent conductive film, IR cut coating, decoration coating
etc.( LED )
AR Coating, Dichroic Mirror, PBS, Cold Mirror etc.
AR/AS(AR/Anti Electromagnetic wave coating) etc.
ITO Transparent Conductive Film etc.(Optical parts and lenses in
3.For Optical Communication:
NBPF, BBPF, Edge filter, AR Coating, GFF etc.( DWDM Filter )
AR Coating, BPF, Edge filter, HR Coating etc.(lenses and optical
parts for semiconductor industry facilities laser, optical switch)
5.Optical Storage Media:
AR Coating, BS Coating etc.( optical parts and components for
optical disks such as DVD,CDRW,CDR,CD)
6.For Bio-Industry :
BPF,Edge filter,AR Coating,Mirror, HR Coating,Cold Mirror etc.(
Optical parts and lenses in liqid crystal projectors,liquid crystal
displays, organic electro luminessences)
7.For Vehicle-mounted device
Flat plate display,Vehicle-mounted camera,panel
Acceptance Process: After machine making ,Seller will inform buyer to come to factory
to check, at that time it can be testing for coating sample ,in
user factory as the final checking. Seller must install ,testing on
time and on the quality .After the whole machine be installed
,tested ,please buyer depend on the technology agreement and
What we will do for you ?
1.Installation: The supplier should send engineers to buyer's factory and help
installation, commissioning and support of the production process.
The round tickets, room and food should be to be paid by buyer. The
buyer should assist and cooperate when needed.
2.Traning:during installation ,operator and maintenance man must full
participate .supplier will provide traning in the locale including
daily operation ,maintenance ,operation problem analyze and process
3.After sale service: One year guarantee ,it will offer the best service in the
guarantee or past guarantee .Due to improper use, or other damage
to the equipment not itself no warranty, wearing parts is no in the
repair. Guarantee begin to the machine finish testing .